Focus adjustment for surface part inspection

ABSTRACT

A method and apparatus for optimizing inspection high-speed optical inspection of parts using intelligent image analysis to determine optimal focus using high numerical aperture (NA) optics, achieve a superior signal-to-noise ratio, resolution, and inspection speed performance with very limited depth of field lenses.

CROSS REFERENCE TO RELATED APPLICATION

This application is a continuation of U.S. patent application Ser. No.13/651,583, filed on Oct. 15, 2012, which claims priority to U.S.Provisional Patent Application No. 61/547,916 filed Oct. 17, 2011 whichis incorporated herein by reference, in its entirety.

FIELD OF INVENTION

This invention generally relates to the optical inspection of electronicparts and more specifically to an autofocus system for use in suchoptical inspection.

DESCRIPTION OF RELATED ART

Optical inspection of electronic parts such as such as wafers, circuitboards, flat panel displays, multi-chip modules, and high-densityelectronic packages requires the use of high resolution optics to detectsmall defects in the part. In addition the high resolution optics partmust be kept in focus during the entire inspection to see the defects.FIG. 1 is the example of a part 1-1 with variations in surface height Zin both the scanning direction 1-2 and in an orthogonal directionrelative to the scanning direction. Newly introduced circuit boards withembedded dies are examples of such parts and are recognized as beingdifficult to image because the surfaces being imaged are subject toheight variations caused by the embedded die or circuits placed on andbetween the substrate layers and the recognized characteristics that thesubstrate itself will warp.

FIG. 1 is helpful in understanding problems that exist when prior artapparatus is required to image defects in various parts. In the priorart, a camera, not shown, scans over the surface of a part in a scanningdirection 1-2. As the scan images an area such as shown in FIG. 1 whichis transverse to the scanning direction 1-2, the image taken by thecamera must be in focus. The part shown in FIG. 1 has a range of heightvariations, shown by arrows 1-3 that must be within the depth of fieldof the camera optics. With prior art imaging apparatus, a particularfocus point selected for the camera could arbitrarily be at the top 1-5of or the bottom 1-6 of the part or at any intermediate position. Giventhis, optics design of the imaging optics sets the required depth offield, preferably twice the distance between the top 1-5 and bottom 1-6of the part as shown by arrows 1-7 and 1-8 that depict a depth that willcover the range of height variations. However, as known and described ingreater detail later, the depth of field for an optics system alsodetermines the resolution of the image. Such resolutions often limitimage quality that will prevent the detection of small defects in thepart.

To inspect the part for defects a camera is frequently used to scan thepart in a serpentine pattern as illustrated by the contiguous strips Athrough E in FIG. 2. The width of the camera's field of view isrepresented by rectangle 2-1. Various techniques have been described inthe art to maintain focus during such inspections. U.S. Pat. No.7,015,445 to Bishop for “Method for Optimizing Inspection Speed in Low,and Fluorescent Light Applications without Sacrificing Signal to NoiseRatio, Resolution, or Focus Quality” describes the use of atriangulation sensor to maintain a constant distance between the imagingoptics and part as the part is scanned. FIG. 3 shows a wavy part 3-1 atan incline θ, imaging optics 3-2 and an imaging camera 3-3. As the partis scanned the imaging optics 3-2 and imaging camera 3-3 are raised andlowered as a unit to keep the surface of the part within the opticaldepth of field 3-4 of the imaging optics. Conceptually the part, theoptics, or the combination of the optics and camera can be moved tomaintain focus.

FIG. 4 shows the use of a triangulation sensor with an optical source4-1, illumination beam 4-2 and position sensor 4-3. The triangulationsensor scans ahead of the camera as indicated by arrow 4-4. The positionat which optical beam 4-5 hits the position sensor indicates thedistance to the part 4-6. In this FIG. 4, the imaging camera optics hasa depth of field (DOF) 4-7. This distance measurement is used in afeedback loop to mechanically move either the imaging optics or the partrelative to each other to maintain focus. FIG. 5 shows how the positionof the beam onto position sensor 5-1 moves as a function of the distanceto the part. Three surfaces at different distances represented bysurfaces 5-3, 5-4, and 5-5, are projected onto sensor 5-1 at positions5-3′, 5-4′, and 5-5′ respectively. These distance measurements are usedin a feedback loop mechanically to move either the optical head or thepart as a function of the measured height to maintain focus.

There are two limitations to these focusing methods. First, if anillumination beam 4-2 in FIG. 4 hits the part at a material boundary thedistance measurement may be incorrect. Referring to FIG. 6 andspecifically to FIG. 6A, when optical beam 6-1 from the triangulationsensor hits highly reflective material 6-2, the entire illumination spot6-3 sits on material 6-2. The image of this spot creates a symmetricalshaped beam 6-4 on sensor 6-5. If the material beneath the sensor nowchanges, as the part is scanned to one with a lower reflectivity,represented by 6-6 in FIG. 6B, a lower intensity spatially symmetricalspot represented by 6-7 is projected onto sensor 6-5. So long asprojected spots 6-7 and 6-4 are spatially symmetrical, the center ofmass of the spots, which represents the distance to the part, will bethe same and the correct focus distance will be calculated. If, however,the illumination spot 6-3 falls on a material boundary as in FIG. 6C, itis spread between highly reflective material 6-2 and lower reflectivematerial 6-3. In this event, the spot projected onto the sensor will notbe symmetrical and the distance to the part will be incorrectlycalculated to be 6-8 when the correct distance should be 6-7 because thecenter of mass of the spot no longer represents the correct distance tothe part.

Second, in FIG. 7 an imaging camera 7-1 with imaging optics 7-2 moves inthe focus direction along a Z axis 7-3 to maintain constant distance tothe surface of part 7-4 while focus distance is adjusted dynamically asthe part is scanned in the Y direction. Focus distance for the entireimaging camera is based on a series of single point measurements along anarrow line in the direction of scan. No measurements are takenperpendicular to the direction of scan. This implies that across thewidth of the camera, or width of each scanned strip A-E shown in FIG. 2all features on the surface must lie within the optical depth of fieldof the imaging optics indicated by arrow 3-4 in FIG. 3. As will beapparent any feature not within the depth of field will be out of focus.

As the part is scanned, the focus measurement unit may pass over high orlow features in the part. Some focus distances may be calculated basedon the distance to a high feature while other focus distances may becalculated based on the distance to a low feature. This implies that theoptical depth of field of the imaging optics must be sufficiently largeto insure proper focus regardless of whether a high or low feature wasbeneath the focus measurement unit at the time when the focusmeasurement was calculated. Calculating focus based only on measurementvalues along a line in the direction of scan will have this limitation,regardless of how many measurements are acquired, how fast thecalculations are computed, the specific method of measurement or type ofmeasurement device. A preferred device is a single point triangulationsensor; single-point confocal sensors, single point capacitive sensorsand others may be substituted depending upon the performance criteria tobe provided by the inspection apparatus.

For current focus tracking technology to properly function the depth offocus of the imaging optics, indicated as arrow 8-1 in FIG. 8, must besufficiently large to guarantee focus for all the possible featuresheights that may be used to calculate the focus distance. It isimportant to note that FIG. 8 represents the surface of the part in theX axis which is perpendicular to the direction of mechanical scan. FIG.8 also represents the image projected onto the long axis of a linear CCDscan camera as represented by block 2-1 in FIG. 2. Unfortunatelyrequiring this large depth of field seriously limits the spatialresolution and defect detection capabilities of the inspection system.More specifically, the optical depth of focus (DOF) is given by theequation:

${DOF} = \frac{\lambda}{2{NA}^{2}}$and Resolution is given by the equation:

${Resolution} = \frac{\lambda}{2{NA}}$where:

-   λ=Wavelength of light imaged onto the camera, and-   NA=numerical aperture of the imaging optics

As known and demonstrated by the foregoing relationships, large depth offocus (DOF) requires a small numerical aperture (NA) while highresolution requires a large numerical aperture. As (NA) becomes smaller,the level of light reaching the imaging camera, also decreases and thisimpacts the contrast in the final image. These criteria imposelimitations on the inspection of parts that can prevent the constructionof imaging optics with both a large depth of focus and a highresolution. As will be apparent, if the part being inspected must stayin focus, current inspection systems sacrifice the resolution of theimaging optics which thereby inherently limits the ability to detectsmall defects.

Table 1 is a list of commercially available lenses from the ZeissCorporation. The table lists the depth of focus, numerical aperture,resolving power, light collection coefficient, light collection coneangle, working distance magnification and part number for each lens.

TABLE 1 Commercially Available Objective Lenses From ZeissMagnification/ pixel size (microns) Zeiss Part Number Numerical Aperture(NA) Light Collection Coefficient (NA²) Light Collection Cone Angle(degrees) θ = 2 × sin¹(NA) Resolving Power for A = 0.55 (Microns)$\frac{\lambda}{2 \times {NA}}$ Depth of Focus A = 0.55$\frac{\lambda}{2{NA}^{2}}$ Working Distance (WD) 1.25×/10.4 4423000.035 0.0012 4.0 7.8 229 3.9 mm 2.5×/5.2 442310 0.075 0.0056 8.6 3.6 499.4 mm 5×/2.6 440320 0.15 0.0225 17 1.8 12.2 13.6 mm 5×/2.6 — 0.250.0625 29 1.1 4.4 10×/1.3 442832 0.25 0.0625 29 1.1 4.4 12.7 mm 10×/1.3442330 0.30 0.0900 35 0.9 3.1 5.7 mm 20×/0.65 442840 0.40 0.1600 47 0.71.7 9.8 mm 10×/1.3 440135 0.50 0.2500 60 0.5 1.1 2.0 mm 20×/0.50 4423400.50 0.2500 60 0.5 1.1 1.4 mm

Note that the 1.25× lens with an NA of 0.035 has a depth of focus of 229microns whereas the 20× lens with an NA of 0.50 only has a depth offocus of 1.1 microns. Unfortunately, unless all the features in thefield of view of the inspection camera vary in height less than 1.1microns, the 20× 0.5 NA lens cannot be used to inspect the part.Therefore many inspection systems are forced to use low NA optics tomaintain focus and are unable to inspect very small features thatrequire high magnification and high resolution.

SUMMARY

Therefore, it is an object of this invention to provide a method andapparatus for providing high-speed autofocusing that enables features ona part to be identified based on their height and focused upon duringinspection thereof.

Another object of this invention is to provide high-speed autofocusingthat enables features on a part to be identified based on their heightand focused upon during inspection thereof with imaging optics thatprovides sufficiently high resolution and depth of field to detect smallfeatures and defects on the part.

In accordance with one aspect of this invention a method for inspectinga part takes a plurality of images of different image fields of the partwith an imaging camera having imaging optics with a fixed resolution anddepth of field. The surface of the part is characterized by heightvariations within a given image field and by the image optics depth offield such that focusing on any point in the given image field does notguarantee that the entire corresponding image will be in focus. Theheight of the part surface is sampled at multiple positions in the givenimage field with a sample spacing that is sufficiently small todetermine the range of height variations of the surface in the imagefield. A focus position for the imaging optics for each image isdetermined based upon the sampled heights for the given image field suchthat all surfaces of interest in the image field will be within thedepth of field for the imaging optics. The imaging optics is moved tothe focus position for the given image field whereby the image will bein focus across the image field.

BRIEF DESCRIPTION OF THE DRAWINGS

The appended claims particularly point out and distinctly claim thesubject matter of this invention. The various objects, advantages andnovel features of this invention will be more fully apparent from areading of the following detailed description in conjunction with theaccompanying drawings in which like reference numerals refer to likeparts, and in which:

FIG. 1 depicts a portion of a part for inspection with variations insurface height;

FIG. 2 depicts a prior art autofocus methodology;

FIG. 3 depicts a part with a wavy portion at an incline;

FIG. 4 depicts a prior art optical inspection system that incorporatestriangulation;

FIG. 5 is useful in understanding this invention;

FIG. 6 includes FIGS. 6A, 6B and 6C and is useful in understanding alimitation of prior art optical inspection systems;

FIG. 7 is useful in understanding another limitation of prior artoptical inspection systems;

FIGS. 8 through 11 are useful in understanding this invention;

FIGS. 12A and 12B are block diagrams of two embodiments of thisinvention;

FIGS. 13 and 14 are useful in understanding the operation of the firstembodiment of the apparatus in FIG. 12A;

FIG. 15 is useful in understanding the operation of the secondembodiment of the apparatus in FIG. 12B; and

FIGS. 16A and 16B are photographs of inspected images taken by prior artapparatus and apparatus of this invention.

DESCRIPTION OF ILLUSTRATIVE EMBODIMENTS

An intelligent autofocus system in accordance with this inventionanalyzes the surface heights of the features in a part in real time asthe part is scanned to create an optimally focused image for inspectionof the desired features in the part. It can be implemented as astand-alone unit placed in advance of the inspection camera orincorporated into a real time through the lens inspection system.

One feature of this invention is the ability to dynamically compute andmechanically track the optimal focal plane for a given imaging opticsduring inspection of the part. As one example, consider FIG. 9 whichshows imaging optics with depth of field indicated by arrow 9-1. Usingthe prior art technology, the imaging optics would either be focused onthe lower surface 9-2 or upper surface 9-3. If the imaging optics werefocused on lower surface 9-2, the top surface 9-3 will be out of focus.Likewise, if an imaging optics were focused on top surface 9-3, thelower surface will be out of focus. As the part is scanned both surfacesmay appear beneath the prior art focusing system. At some positions thetop surface may be in focus, and at other positions the lower surfacemay be in focus, so there is no way of knowing which surface will be infocus at any given time as the part is scanned. This makes highresolution inspection nearly impossible. One feature of this inventionis to provide a method of intelligently identifying the heights of bothsurfaces, to determine an optimal focus plane spaced between the twosurfaces indicated by position 9-4 that will enable both surfaces toremain within the optical depth of field of the given objective duringthe inspection of the part.

In many applications the resolution required for inspection is so highand depth of field is so low or the height difference between featuresis so large such that is not possible to keep all surfaces in focussimultaneously as the part is inspected. This is illustrated in FIG. 10which shows a medium resolution lens 10-1 and higher resolution lenswith lower depth of field 10-2. Referring to FIG. 11, if such a part isto be inspected with high resolution, low depth of field optics 11-1, itmust be decided prior to scanning the part whether the specific scanwill inspect the lower surface 11-2 or the upper surface 11-3. Inapplications such as wafers, high density interconnect modules, andprinted circuit boards, the part consists of metal conductors placedonto a substrate. The metal conductors, which form the top surface, arethe primary features of interest to be inspected for defects. Thisinvention provides means to dynamically compute the height of the metalupper surface 11-3 and keep it in focus as the part is scanned.

Referring to FIG. 12A, as a part is scanned and inspected in visiblelight (350 nm to 700 nm) as indicated by arrow 12-1, an infrared beam12-2 (780 nm, for example) passes through the optics and is used tomaintain focus. The infrared beam from a focus illumination source 12-3comprising a laser diode, solid state LED, or any other light-emittingdevice is collimated by lens 12-4. The collimated light passes through acylinder lens 12-5 and beam splitter 12-6 to reflect from a dichroicmirror 12-7 through a lens 12-8 to project a line 12-9 onto the part12-11. This focused beam is positioned off axis to illuminate only halfof the optical field. So the infrared beam is imaged onto the part at anangle θ, relative to the surface of the part as illustrated in FIG. 12A.Due to the surfaces being at different heights in the part, one side ofthe beam projects onto an upper surface 12-10 at a given position in Xand the other side of the beam projects onto a lower surface 12-11 at adifferent position in X. Light rays from the line image projected ontothese surfaces then pass back through lens 12-8, reflect from dichroicmirror 12-7 and beam splitter 12-6 and then are focused by a lens 12-12onto a positioning or height measurement camera 12-13.

In one embodiment the entire focus path operates in the infraredwavelength (780 nm, as an example) so this focus light does notinterfere with the visible light inspection path that operates in therange of (350-700) nm. The visible light path consists of anillumination source 12-14 and light from that source 12-14 reflects froma beam splitter 12-15 to pass through dichroic filter 12-7 which passesthe visible light and reflects the infrared light. This visible beamthen passes through broadband imaging lens 12-8, which also passes bothvisible and near infrared light. The reflected visible light image thenreturns through lens 12-8, passes through dichroic filter 12-7 and beamsplitter 12-15 to be imaged by lens 12-16 onto inspection camera 12-17.Other means may be used to produce light 12-14 used by inspection camera12-17. For example, some parts to be inspected may have an organicsingle layer, an organic non-transparent layer, or very opaque organicmaterial, in which only the top metal surface needs to be inspected. Insuch cases there is no interference or image artifacts caused from lowerlayer images, which could confuse the auto focus apparatus. In such anapplication an appropriate laser could be substituted for the source12-3 thereby to cause the top surface to fluoresce. Beam splitter 12-15would be replaced by a dichroic mirror to reflect the laser and permitfluorescence returning from the part to reach inspection camera 12-17. Alaser blocking filter 12-26 to allow only the returning fluorescing raysand also to block any laser illumination light from reaching theinspection camera 12-17 is also placed in front of camera 12-17. Thisfluorescing image may produce better contrast of the conductors on theorganic surface.

Referring to FIG. 13 and to explain in greater detail how the autofocussystem operates, consider a line-shaped beam 13-1, emanating fromoptical lens 13-2 that illuminates a part at an angle θ relative to thesurface of the part as shown in FIG. 13. The position that the line hitsthe top surfaces 13-3 and 13-4 will be offset in the Y direction fromthe position that the line hits the lower surface 13-5 by a distance dsuch that:d=h tan(θ)where:

-   h=height difference between the surfaces, and-   θ=angle of the illumination beam relative to a line perpendicular to    the surface.

Lens 13-2 in FIG. 13 corresponds to lens 12-8 in FIG. 12. The image ofthe projected line pattern is projected onto camera 13-6 whichcorresponds to the height measurement camera 12-13 in FIG. 12. Lines13-3, 13-4, and 13-5 are imaged onto camera 13-6 as lines 13-3′, 13-4′,and 13-5′ respectively.

Camera pixels are organized into rows R and columns C. Arrow 13-7 pointsto the left-most column in the camera 13-6. The row R position of thedata on camera 13-6 indicates the height of the different surfaces onthe part. By intelligently analyzing the image, and more specificallythe row R position of the data, one can determine the location of thetop and bottom surfaces and mechanically drive the focusing lens, cameraand optics to track the desired surface.

As an example, consider a high resolution, high NA optical lens 14-1 inFIG. 14 with corresponding shallow depth of field 14-2. The image of theprojected line pattern is imaged onto camera 14-3. The camera field maybe divided into upper region 14-4 and lower region 14-5. The rowpositions R of the information in upper region 14-4 corresponds to theheight of the upper surfaces on the part. The row positions R of theinformation in lower region 14-5 correspond to the heights of the lowersurfaces on the part.

If the goal is to keep the top surface in focus, then only data in upperregion 14-4 is analyzed to determine the highest and lowest row positionof the data in region 14-4. This corresponds to the height variation ofthe top surface of the part perpendicular to the direction of mechanicalscan across the width of the camera 14-3. The midpoint of this heightvariation is calculated and corresponds to height position 14-6 in thecamera image and 14-7 in optical depth of field image. Position 14-7corresponds to the midpoint of the optical depth of field indicated byarrows 14-2.

In general, the optimal focus point is calculated as a function of thedepth of field of the optics and the inspection plane of interest, bothwhich are known prior to performing the inspection scan. As statedpreviously, the system can be programmed to track the top surface,bottom surface or a midpoint between the surfaces if the depth of fieldis sufficient to keep both surfaces in focus simultaneously as shown byposition 9-4 in FIG. 9.

To summarize, as the part is scanned in the Y axis direction, the focuscamera 14-3, collects data in the X direction corresponding to the widthaxis of the inspection camera 2-1 in FIG. 2. The data is analyzed acrossthe entire focus camera to determine a unique single optimal focus pointfor each different position along the scanning Y axis.

High speed autofocus tracking is essential for quick inspection of suchparts. High speed focus calculations and mechanical response is evenmore essential to achieve real time through the lens focusing To achievesuch high speed operation it is advantageous to use as a focus camera12-13 in FIG. 12A, a camera in which one can selectively pick the camerapixels to read out of the camera, rather than having to read out all thepixels into a storage device and then read the pixels of interest. Thissaves much time. For example if the focus camera has a total of1000×1000 pixels (10⁶ pixels total) and one can determine the locationof the top surface of a part by sub-sampling every 5^(th) horizontalcamera pixel and every other vertical pixel within the top half of thecamera. This would reduce the amount of data by a factor 20. Selectingevery 5^(th) or N^(th) horizontal pixel in the camera image createsspecific columns of data. The spacing between such columns is indicatedby arrow 14-8 in FIG. 14. Thus, by being able to selectively choosespecific regions of interest within the focus camera's field of view,box 14-4 for example, and selectively choosing or sub-sampling pixelswithin this region greatly decreases the time required to compute theoptimal focus positions.

Such a camera made by Photon Focus model MV-D1024E-80-CL or a fastercamera with more pixels made by Basler model acA2000-340 km has beenused to implement camera block 12-13 in FIG. 12A. This Photon Focuscamera contains 1024×1024 pixels, has a spectral response from 350-1000nm making it capable of operating in the near infrared band and enablesreading out of select regions and pixels within the camera. To implementthe focus calculation described in this invention, 40,000 pixels havebeen read out of this camera at a rate of 1000 frames per second. TheBasler camera contains 2048 columns×1000 rows and also has a spectralresponse from 350-1000 nm making it capable of also operating in thenear infrared band and enables reading out of select regions and pixelswithin the camera. To implement the focus calculation described in thisinvention, 96,000 pixels have been read out of this camera at a rate of5000 frames per second. The gain of both focus cameras also isprogrammable which supports imaging of a wide range of reflectivematerials and surfaces. A high speed Focus Processor, shown as block12-19 in FIG. 12A, programs the focus camera parameters over line 12-20and reads camera pixel data over line 12-21. A Focus Processor 12-19 hasbeen implemented using Stratix programmable logic devices (PLD's)manufactured by Altera Corporation. The Focus Processor 12-19 alsocommunicates with a general purpose computer 12-25, such as an IntelXenon based computer running Windows XP as an operating system as toenable initial operator setup and control.

During a focus calculation setup operation the Focus Processor 12-19 andor computer 12-25 can adjust both the gain of the focus camera, overline 12-20, and the light intensity of the infrared light source 12-3over line 12-22. The ability to control both these variables providesthe largest possible dynamic range for focusing on either very dim orvery bright materials or surfaces.

Once the optimal focus position has been calculated either the entireoptical head indicated by arrow 12-18 is mechanically moved or justimaging lens 12-8 is mechanically moved, or both are moved in somecombination to maintain focus. The imaging lens 12-8 can be attached toa precision Z axis motor 12-24 to enable rapid motion in the Z focusaxis due to rapid height changes (i.e., high-frequency changes) as shownin FIG. 1. The entire optical head 12-18 can also be attached to aprecision motor or may be attached to a holder for the substrate toenable relative motion in the Z axis between the part and the opticalhead in response to low frequency changes. This may appear when thesubstrate for the part varies due to a lower frequency warpage. Bothmotors can be controlled by the Focus Processor 12-19. This system wasimplemented using a precision linear motor 12-23 produced by PrimaticsCorporation that moved the entire optical head 12-18. The precision Zaxis motor 12-24 that adjusts the image optics relative to the opticalhead and part for producing such rapid motion is a Piezo electric unitmanufactured by PI (Physik Instrumente) L.P. model P-725 PIFOC. ThisPiezo unit can move the imaging optics +/−200 microns in 50milliseconds. Another advantage of the through the lens implementationis that focus accuracy and the spatial distance that the focus linepattern moves on the focus camera tracks the optical depth of field ofthe imaging optics. As depth of field decreases and resolution increasesthe focus line moves a greater distance on the focus camera for a givenchange in z height position of the imaging optics. As an example, usingthe methods and technology described herein, focus was maintained wellwithin a +/−25 micron optical depth of field for imaging optics used toinspect the top surface of parts with height variations within cameraimages also equaling +/−25 microns in which the size of the parts wereup to 500 mm×500 mm which is in the order of sizes of embedded dieapplications. The entire part was in focus over the entire inspection.

FIG. 15 depicts the relationship between a focus line 15-1 correspondingto the focus line 12-9 generated by the apparatus in FIG. 12A and thefield of view 15-2 for the imaging camera 12-17 wherein the focus line15-1 is within the field of view 15-2. When the system incorporates sucha single focus line 15-2 within the field of view 15-1, in someapplications it is possible that by the time the system may move to anewly calculated height the relative positions may have changedproducing a following error because the optical head is attempting tomeasure and move to the same location simultaneously.

In another approach, two focus lines are generated on either side of theinspection camera. FIG. 12B depicts such a two focus-line apparatuswhich is similar to the apparatus shown in FIG. 12A, but that adds asecond illumination source. In this implementation, the optics in thepath for the original height measurement beam 12-2 relocates the beam sothat it reflects to the left of the inspection camera field of view inFIG. 15 as a scan focus line 15-3. A second optical path 12-30 includesa second illumination source 12-31, a collimating lens 12-32 and acylinder lens 12-33. Light emanating from the cylinder lens 12-33reaches the dichroic mirror 12-7 and reflects along a different path toappear as a focus line 15-4 on the other side of the image camera fieldof view 15-1.

As will now be apparent, when the scanning direction of the apparatus inFIG. 12B is from left to right as shown in FIG. 2 as strip A, the focusbeam path 12-30 generates the focus line 15-4 that “leads” the imagingcamera field of view 15-1. When the scanning direction of the apparatusin FIG. 12B is from right to left as shown in FIG. 2 as strip B, thefocus beam path 12-31 generates the focus line 15-3 that “leads” theimaging camera field of view 15-1. Whereas the field of view of theinspection camera is within region 15-1, the field of view of the focuscamera is sufficiently large such that both focus lines 15-3 and 15-4can be seen by the focus camera. In one direction of travel only rows ofdata containing information from focus line 12-30 are read out of thecamera. In the other scan direction only rows of data containinginformation from focus line 12-31 are read out of the focus camera. Toincrease focus camera signal to noise and obtain an even better estimateof height variations in advance of the arrival of the imaging cameralocated at 15-1, successive rows of scanned data that lie betweeninspection camera position 15-1 and the location of the focus line canbe acquired and processed. Such processing can obtain an average foreach height measurement position for a preset number of rows to obtainfiltered values that are then used to position the imaging optics forthe inspection camera 12-17. Thus, in accordance with this invention,they are provided a variety of approaches for acquiring image lenspositioning data.

In each of the embodiments of FIGS. 12A and 12B, the focus illuminationsources 12-3 and 12-3F operate in the infrared. In the foregoingembodiments, the imaging illumination source 12-14 generates light inthe visible spectrum (i.e., white light) for illuminating the part forthe imaging cameras 12-17. FIG. 16A depicts an image obtained using theautofocus system of this invention in combination with white light forimaging the part that comprises an opaque organic substrate 16-1 with aplurality of spaced parallel copper conductors 16-2. This is alow-contrast image because the imaging camera 12-17 in FIGS. 2A and 12Breceives scattered radiation reflections. FIG. 16B depicts the same partwhen the imaging camera light source 12-14 comprises a laser with afrequency that will cause the substrate 16-1 to fluoresce. In thisconfiguration, beam splitter 12-5 is replaced with a dichroic filter toreflect the laser and permit returning fluorescent light to reachinspection camera 12-17. In addition a blocking filter 12-26 is insertedin front of lens 12-16 to prevent any reflected laser light fromreaching imaging camera 12-17 and insuring only fluorescent lightemitted from the organic surface reaches imaging camera 12-17. As thesubstrate 16-1 is opaque, and as the substrate 16-1 is intact, nofluorescence from any lower layer is received. FIG. 16B shows theresulting fluorescent image with a bright substrate 16-1 and darkconductors 16-2. The improved high contrast image readily allows theidentification of defects such as defects 16-3, 16-4 and 16-5. It willbe apparent, however, that the use of fluorescence in such devices islimited to the inspection of non-fluorescing conductors on the surfaceof opaque organic substrates because the autofocus apparatus assumesthat all variations in height as measured in the infrared are the resultof height variations on the top surface of the organic substrate. If theautofocus apparatus were to be used on transparent layers the focusapparatus would not be able to determine which features were on the toplayer and could potentially focus on the incorrect layer. It is alsoimportant to note that focusing wavelengths not in the infrared band canbe used as long as the wavelength of the focusing source is excludedfrom the range of wavelengths imaged by inspection camera 12-17.

As will now be apparent, autofocus apparatus as disclosed herein meetthe objectives of providing accurate focus positions for an imagingcamera which assures that the entire image in the image camera's fieldof view will be in focus. Moreover, the disclosed and other embodimentsof this invention can be implemented without departing from the spiritand scope of this invention and can realize any or all of the benefitsof this invention. Therefore, it is intent of the appended claims tocover all such variations as come within the true spirit and scope ofthis invention.

What is claimed as new is:
 1. An optical measurement system used wheninspecting a part as the part is scanned along an axis relative to theoptical measurement system, said system comprising: a data acquisitionsystem, comprising: a height measurement system operating in a firstfrequency and adapted to provide a height output signal indicative ofheight variations of the part surface at multiple positions within agiven image field; an imaging camera operating in a second frequencythat is non-interfering with the first frequency and adapted to providean image output signal indicative of images of the part; an opticalsystem including an objective lens positioned to direct illumination inthe first and second frequencies to the part and imaging optics adaptedto direct illumination in the first frequency from the part to theheight measurement system and to direct illumination in the secondfrequency from the part to the imaging camera; and a motor coupled withthe optical system to locate the optical system at a focus positionduring scanning of the part; and a data processing system adapted toreceive the height output signal, identify a range of height variationsfor the part surface, determine a subsequent focus position for theoptical system such that surfaces within the range of height variationswill be within a subsequent image field for the depth of field of theimaging camera and produce a height adjustment signal to the motor tomove the optical system to the subsequent focus position during scanningof the part.
 2. The system of claim 1, wherein the imaging cameracomprises a line camera.
 3. The system of claim 1 wherein the firstfrequency is in the infrared band.
 4. The system of claim 1 wherein thesecond frequency is in the visible light band.
 5. The system of claim 1wherein imaging camera includes a linear charge coupled device.
 6. Thesystem of claim 1 wherein the imaging camera includes a time delay andintegrated charge coupled device.
 7. The system of claim 1 wherein afield of view for the focus camera is exclusive of a field of view forthe imaging camera.
 8. The system of claim 1 wherein the heightmeasurement system generates two focus lines on either side of a fieldof view for the imaging camera.
 9. The system of claim 1 wherein theheight measurement system projects a line pattern at an inclined anglerelative to a surface of the part and perpendicular to a direction ofthe axis.
 10. A method for inspecting a part surface, comprising:scanning the part surface during a scanning operation along a mechanicalscan axis relative to imaging optics; imaging, using an objective lens,the part surface within a first image field with an imaging cameraresponding to illumination at a first frequency; during said imaging,acquiring, using the objective lens, height measurement data of the partsurface in a subsequent image field from illumination received at asecond frequency that is non-interfering with the first frequency anddetermining a range of height variations of the part surface for thesubsequent image field based on the height measurement data; determininga focus position for the imaging optics based upon the range of heightvariations such that the range of height variations for the part surfacein the subsequent image field will be within a depth of field for theimaging camera, and moving the imaging optics to the focus positionwhereby an image acquired by the imaging camera will be in focus acrossthe depth of field while the height measurement system acquires heightmeasurement data of the part surface for a second subsequent image fieldwhile scanning the part surface.
 11. The system of claim 1 wherein afield of view for the focus camera is exclusive of a field of view forthe imaging camera.
 12. A method for inspecting a part as the part isscanned relative to imaging optics along a scan axis, comprising:simultaneously receiving through an objective lens height measurementdata of a selected width from a focus line projected on the part at asurface position operating in a first frequency and inspection imagedata from an imaging camera operating in a second, non-interferingfrequency and having a field of view spaced apart from the focus linealong the scan axis; and operating a motor to adjust a focus position ofthe objective lens based on the height measurement data while theobjective lens is scanned relative to the part surface such that theinspection image data will be in focus when the imaging camera obtainsinspection image data for the surface position.
 13. The method of claim12, further comprising sampling a portion of the height measurement datato determine the focus position.
 14. The method of claim 13, whereinsampling comprises, for a number of pixels received corresponding to theheight measurement data, reducing the number of pixels by at least afactor of 20 prior to determining the focus position.
 15. The method ofclaim 12, wherein the selected width corresponds to a width of the fieldof view.
 16. The method of claim 12, wherein illumination in the secondfrequency causes the part surface to fluoresce.
 17. The method of claim12, wherein simultaneously receiving further includes receiving heightmeasurement data from a second focus line projected on an opposite sideof the field of view for the first-mentioned focus line.
 18. The methodof claim 17, wherein the first focus line, the second focus line and thefield of view of the imaging camera are within a field of view of afocus camera.
 19. The method of claim 12, wherein the height measurementdata corresponds to a first surface on the part and the image datacorresponds to a second surface on the part spaced from the firstsurface in a direction perpendicular to the scan axis.
 20. The method ofclaim 12, wherein the focus line is outside the field of view of theimaging camera.